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- AMA Conferences
- Dresdner Sensor-Symposium
- Sensoren und Messsysteme
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International Meeting on Chemical Sensors
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14th International Meeting on Chemical Sensors - IMCS 2012
- Plenary sessions
- 1.1 High Temperature Gas Sensors I
- 1.2 Biosensors I
- 1.3 Metal Oxide-based Gas Sensors I
- 1.4 Sensors Arrays
- 1.5 Transistor-based Sensors
- 2.1 High Temperature Gas Sensors II
- 2.2 Biosensors II (DNA, SPR)
- 2.3 Metal Oxide-based Gas Sensors II
- 2.4 Resonant Sensors I
- 2.5 IR and Raman-based Sensors
- 3.1 Carbon Nano Tubes
- 3.2 Biosensors III (cell based)
- 3.3 Metal Oxide-based Gas Sensors III
- 3.4 Sensor Systems
- 3.5 ISFETs
- 4.1 Electronic Potential-based Sensor
- 4.2 Biosensors IV (Systems)
- 4.3 Metal Oxide-based Gas Sensors IV
- 4.4 EU NetAir (Special Session) I
- 4.5 Wireless Sensing
- 5.1 Impedance-based Sensing
- 5.2 Novel Sensing Principles
- 5.3 Metal Oxide-based Gas Sensors V
- 5.4 Resonant Sensors II
- 5.5 Cation Conductor-based Gas Sensors
- 6.1 FET- and MIP-based Sensors
- 6.2 Flexible substrate sensors
- 6.3 Metal Oxide-based Gas Sensors VI
- 6.4 Sensors for Explosives
- 6.5 YSZ Based Sensors
- 7.1 Chemical Sensors for Medical Application
- 7.2 Electrochemical Sensors I
- 7.3 Metal Oxide-based Gas Sensors VII
- 7.4 EU NetAir (Special Session) II
- 7.5 Chemical Sensors using Optical Technologies
- 8.1 Chemical Sensors based on III-V Semiconductors
- 8.2 Electrochemical Sensors II
- 8.3 Metal Oxide-based Gas Sensors VIII
- 8.4 Nanowire-based Sensors
- 8.5 Optical absorbance-based Sensors
- P1.0 Metal Oxide-based Sensors
- P1.1 Biosensors
- P1.2 Resonant Sensors
- P1.3 Sensors Based on Optical Techniques
- P1.4 Nanostructured Sensors
- P1.5 FET-based Sensors
- P1.6 Electrochemical-based Sensors
- P1.7 Nanostructured Metal Oxide-based Sensors
- P1.8 Sensors Based on New Materials
- P1.9 Technology and Application
- P2.0 Metal Oxide-based Sensors
- P2.1 Biosensors
- P2.2 Resonant Sensors
- P2.3 Sensors Based on Optical Techniques
- P2.4 Nanostructured Sensors
- P2.5 FET-based Sensors
- P2.6 Electrochemical-based Sensors
- P2.7 Nanostructured Metal Oxide-based Sensors
- P2.8 Sensors Based on New Materials
- P2.9 Technology and Application
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14th International Meeting on Chemical Sensors - IMCS 2012
Proceedings keywordsearch
3.4.2 New planar trace humidity sensor
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- 3.4 Sensor Systems
- Author(s)
- C. Tiebe, T. Hübert - BAM Federal Institute for Materials Research and Testing (Germany), A. Lorek - German Aerospace Center (DLR) (Germany), R. Wernecke - dr. wernecke Feuchtemesstechnik GmbH (Germany)
- Pages
- 294 - 297
- DOI
- 10.5162/IMCS2012/3.4.2
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
A new planar sensor element for continuous coulometric trace humidity measurements in industrial gases has been developed. In order to ensure precise measurements a calibration facility including a precision dew point hygrometer as a reference device was developed. The sensor can measure the humidity in the frost point temperature range of -20 °C to -80 °C and has an expanded uncertainty of 2 K, a fast reaction time and a settling time of the entire system from 15 to 30 min.