P3.2 - Low-cost Thick-film Sensor Based on Piezoelectric Effect for Ballistic Application

Event
AMA Conferences 2013
2013-05-14 - 2013-05-16
Nürnberg
Band
Proceedings SENSOR 2013
Chapter
P3 - Technology
Author(s)
D. Crescini - Università di Brescia (Italy)
Pages
739 - 742
DOI
10.5162/sensor2013/P3.2
ISBN
978-3-9813484-3-9
Price
free

Abstract

A new type of pressure sensor is presented which is based on the piezoelectric effect principle in screen printed and fired thick-films. The sensitive element, consisting of a circular piezoelectric layer sandwiched in two conductive layers, is screen printed and fired over an alumina substrate, 2 mm thickness and 3 mm diameter. The sensitive element has a structure of a plane capacitor with the piezoelectric film as dielectric and the two conductive layers, based on Pt/Au material, as armatures. Device was incapsulated in a stainless steel housing for the dynamic test. The measuring range covers pressure up to 100 MPa while the reaction time is less than 10 s. The experimental analysis shows, in a measuring range up to 100 MPa, a sensitivity of about 80-110 pC/MPa. The linearity in the range 25-60 MPa is  2 % FSO while in the range 60-150 MPa is  3 %FSO.

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