IP8 - Fabrication and Characterization of IC-Compatible Multilayer Interference Filters

Event
SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg
Band
Proceedings OPTO 2009 & IRS² 2009
Chapter
IRS² Poster Session
Author(s)
G. de Graaf, A. Emadi, R. Wolffenbuttel - Delft University of Technology, Delft, The Netherlands
Pages
313 - 317
DOI
10.5162/irs09/ip8
ISBN
978-3-9810993-6-2
Price
free

Abstract

This paper reports the design and characterization of IC-compatible Multilayered Fabry-Pérot Midinfrared optical filters. The filters have been designed for application in Mid-infrared Spectrometry. An important class of microspectrometers in IC technology is based on arrays of optical filters and detectors composed of IC-compatible materials with proper optical properties over the spectral range of interest. An IC-processed wafer with circuits and a micro-fabricated array of IR detectors can be used as a generic platform and accommodated to suit a particular application by post-process sputtering of layers of appropriate thickness. The filters have been fabricated as layered thin-film stacks of SiO2 and poly-Silicon. A set of filters covering the range from 2.2 µm to 3 µm with a typical HPBW of 30 nm and another series tuned at 3.8 µm to 4.3 µm have been designed, fabricated and measured. Suitable samples have been tested for application as optical filters for NDIR infrared gas sensing applications.

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