| SENSOR+TEST Conferences 2009 |
B3.1 - Novel Silicon High Pressure Sensing Element |
P. Heinickel, R. Werthschuetzky - Technische Universität Darmstadt, Darmstadt, Germany |
| SENSOR+TEST Conferences 2009 |
B3.2 - Ultra-Low Power Pressure Sensing: A Capacitive Based MEMS Approach |
M. Clifford - Kavlico Corp., Moorpark, USA |
| SENSOR+TEST Conferences 2009 |
B3.3 - Fabrication of Microfluidic Devices Using SU-8 for Detection and Analysis of Viruses |
C. Garcia, W. Lang - University of Bremen, Bremen, Germany, A. Schomacker, I. Klarholz, C. Harms - Technologie-Transfer-Zentrum Bremerhaven, Bremerhaven, Germany |
| SENSOR+TEST Conferences 2009 |
B3.4 - Resonant Mode Detection for Fast Determination of Structural and Material Parameters of MEMS |
M. Meinig, S. Kurth, T. Gessner - Fraunhofer ENAS, Chemnitz, Germany, A. Shaporin - Chemnitz University of Technology, Chemnitz, Germany, W. Bauer - Polytec GmbH, Waldbronn, Germany |