P2.0.14 Deposition of nanocrystalline WO3 thin film using magnetron sputtered multilayer structure in view of gas sensor applications
- Event
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
Nürnberg/Nuremberg, Germany - Chapter
- P2.0 Metal Oxide-based Sensors
- Author(s)
- T. Pisarkiewicz, W. Maziarz, A. Rydosz, H. Jankowski, J. Sokulski - AGH University of Science and Technology, Faculty of Electrical Eng., Automation, Computer Science and Electronics, Department of Electronics (Poland)
- Pages
- 1305 - 1307
- DOI
- 10.5162/IMCS2012/P2.0.14
- ISBN
- 978-3-9813484-2-2
- Price
- free
Abstract
Tungsten trioxide films with nanocrystalline surface were manufactured by deposition of a three layer WO3/W/WO3 structure by RF sputtering and successive annealing of the structure in appropriate temperature range. Surface morphology was controlled by the thickness of the metal layer and upper oxide layer. WO3 sample after annealing was not homogeneous, revealing lower density in the region of upper layer. The obtained samples were sensitive to nitrogen dioxide, exhibiting better stability at lower working temperatures.