| AMA Conferences 2015 |
D4.1 - Inkjet and Aerosol Jet® Printed Sensors on 2D and 3D Substrates |
B. Polzinger, J. Keck, V. Matic, W. Eberhardt - Hahn-Schickard-Gesellschaft – Institut für Mikroaufbautechnik (HSG-IMAT), Stuttgart (Germany), H. Kück - Universität Stuttgart (Germany) |
| AMA Conferences 2015 |
D4.2 - Investigation of DRIE etching performance on signal quality of a SOI based pressure sensors for harsh environments |
P. Mackowiak, F. Meinecke, O. Ehrmann, K. Lang - Technical University Berlin (Germany), B. Mukhopadhyay, T. Hoang, Q. Dao - Fraunhofer Institute for Reliability and Microintegration, Berlin (Germany), H. Ngo - University of Applied Sciences, Berlin (Germany) |
| AMA Conferences 2015 |
D4.3 - Silicon probing tips coated with protective aluminum oxide thin films for fast tactile cantilever sensors |
H. Wasisto, F. Yu, M. Deeb - TU Braunschweig (Germany), L. Doering, U. Brand - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany), A. Bakin, A. Waag, E. Peiner - Laboratory of Emerging Nanometrology, Braunschweig (Germany), S. Völlmeke - CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH, Erfurt (Germany) |
| AMA Conferences 2015 |
D4.4 - Printed Sensor for Integrating in Aluminum during Casting |
G. Dumstorff, W. Lang - Microsystems Center Bremen (MCB), Universität Bremen (Germany) |