B3.2 - Ultra-Low Power Pressure Sensing: A Capacitive Based MEMS Approach
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings SENSOR 2009, Volume I
- Chapter
- B3 - Micro Sensors
- Author(s)
- M. Clifford - Kavlico Corp., Moorpark, USA
- Pages
- 187 - 192
- DOI
- 10.5162/sensor09/v1/b3.2
- ISBN
- 978-3-9810993-4-8
- Price
- free
Abstract
In a world where wireless sensing and energy harvesting are becoming pervasive technologies, power consumption is becoming more critical for sensor design. This talk will address methods to achieve an ultra-low power consumption sensor using a capacitive sensing element and capacitive interfacing. Using Kavlico's sCAP technology as a case study, we will step through the low-power design techniques that have enabled the creation of a sensor consuming < 10µW with better than 1% full scale accuracy meeting typical automotive tire-pressure and temperature requirements. With the proposed multiplexed multi-slope procedure, a product designer has the ability to interface with multiple capacitive sensors and provide the readout on a single output line.