MP62 - Piezoresistive Pressure Sensors Based on ZrO2 Substrate Fabricated by Photolithography and Inkjet Printing
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Poster I
- Chapter
- Physical Sensors
- Author(s)
- V. Povolny, A. Laposa, J. Kroutil - Czech Technical University in Prague, Prague (Czech Republic)
- Pages
- 327 - 328
- DOI
- 10.5162/EUROSENSORS2025/MP62
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
This work compares piezoresistive pressure sensors fabricated on ZrO₂ substrates using two different manufacturing technologies: photolithography and inkjet printing. Both fabrication methods produced sensors with precise and reproducible dimensions, with initial tests showing clear differences in sensitivity and performance, highlighting the potential of each technology for specific applications.