IS 2.4 - A Hitchhiker's Wave Guide to Photonic Chips: Physics, fabrication, and the road to volume
- Event
- EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich - Band
- Lectures
- Chapter
- Industry Session 2
- Author(s)
- J. Voigt, C. Bilgeri, M. Flemming, G. -A. Rezzoli, W. Arens - IMT Masken und Teilungen AG,Greifensee (Schweiz)
- Pages
- 319 - 320
- DOI
- 10.5162/eurosensors2026/IS2.4
- ISBN
- 978-3-910600-12-6
- Price
- free
Abstract
Evanescent field sensing enables the measurement of small refractive index changes at the interface of a planar optical waveguide and its surface coating. It has been researched in academic environments for the past 30 years. One of the recently emerging technologies is Grating-coupled Interferometry (GCI), which enables label-free, real-time analysis of molecular interactions at surfaces. A key challenge of this technology is the fabrication of waveguide coatings and Grating Couplers at scale. This work shows how we, IMT Masken und Teilungen AG, produce glass- based coplanar waveguide chips in volume, leveraging wafer-based manufacturing techniques of the semiconductor industry. In particular, the in-house developed characterization method will be emphasized.