IS 3.4 - Accelerating Gas Sensor Material Development

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Lectures

Chapter

Industry Session 3

Author(s)

L. N. Sacco - VSParticle B.V.,Delft (The Netherlands)

Pages

325 - 325

DOI

10.5162/eurosensors2026/IS3.4

ISBN

978-3-910600-12-6

Price

free

Abstract

VAT has developed a micro resonator-based pressure sensor enabling high zero-stability. This is achieved by designing a resonator featuring a high-aspect-ratio gap and driving it in a closed loop configuration in order to use the resulting squeeze-film damping as a measure for the pressure. Additionally, a thermo-mechanical decoupling of the MEMS transducer is minimizing environmental disturbances. A zero stability below 10 -2 mTorr is being demonstrated over a period of nine months, offering the means to ensure repeatable control in vacuum processing applications for semiconductor manufacturing.