IS 4.2 - microGauge – a Micro Resonator Gauge (MRG) Featuring a High-Stability Zero for Vacuum Process Control

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Lectures

Chapter

Industry Session 4

Author(s)

S. Kühne, N. Wojtas, S. Demicheli, V. Barreiro Lomba, M. Trant, P. Rhyner, S. Kohler, U. Bartsch - VAT Vakuumventile AG,Haag (Switzerland)

Pages

326 - 327

DOI

10.5162/eurosensors2026/IS4.2

ISBN

978-3-910600-12-6

Price

free

Abstract

VAT has developed a micro resonator-based pressure sensor enabling high zero-stability. This is achieved by designing a resonator featuring a high-aspect-ratio gap and driving it in a closed loop con-figuration in order to use the resulting squeeze-film damping as a measure for the pressure. Additionally, a thermo-mechanical decoupling of the MEMS transducer is minimizing environmental disturbances. A zero stability below 1e-2mTorr is being demonstrated over a period of nine months, offering the means to ensure repeatable control in vacuum processing applications for semiconductor manufacturing.