4.4 - Low-cost uncooled infrared detector using thermomechanical micro-mirror array with optical readout

Event
AMA Conferences 2013
2013-05-14 - 2013-05-16
Nürnberg
Band
Proceedings IRS² 2013
Chapter
I4 - Imaging
Author(s)
M. Steffanson, K. Gorovoy, M. Holz, T. Ivanov, R. Kampmann, R. Kleindienst, S. Sinzinger, I. Rangelow - Ilmenau University of Technology (Germany)
Pages
85 - 88
DOI
10.5162/irs2013/i4.4
ISBN
978-3-9813484-3-9
Price
free

Abstract

We report on the realization and characterization of a novel infrared imaging system. The prototype setup serves as a technological platform for a low-cost uncooled infrared camera. The core component of the infrared imager is a novel-type surface micro-machined sensor consisting of a micro-mirror focal plane array. A micro-mirror represents one pixel and exhibits a linear deflection upon long wave infrared irradiation (7-14 μm). The thermo-mechanical deflection is captured by an optical configuration and real-time, full-frame thermal imagery is generated. The sensor does not require any power for operation and can be micro-fabricated with as little as three lithographic steps using standard CMOS technology.

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