P6 - CMOS Compatible Hyperspectral Optical Filters
- AMA Conferences 2013
2013-05-14 - 2013-05-16
- Proceedings IRS² 2013
- IP - Poster Session
- D. Lerose, D. Sommer, K. Bach, D. Gäbler - X-FAB Semiconductor Foundries AG, Erfurt (Germany), M. Sterger - X-FAB Dresden GmbH & Co KG, Dresden (Germany)
- 116 - 120
Commonly, optical filters consist of pigments on glass or of many stapled interference layers. In both cases, they are not applied on CMOS devices within the fab line, as they are not CMOS-compatible. Consequently, further processing is needed and high additional costs are incurred. It is presented a method for producing tuneable optical filters with tuneable transmission spectra in a CMOS-line.The filters are constituted by a Fabry-Perot resonator formed by two Bragg mirrors separated by a patterned cavity. The filter response can be tuned by changing the geometric parameters of the patterning, and consequently the cavity effective refractive index. In this way, many different filters can be produced at once on a single chip, allowing multichanneling. The filter has been designed, produced, and characterized. The results for a chip with 24 filters are presented.