A8.4 - Measuring Technology for a Magnetostrictive Microactuator
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg
- Proceedings SENSOR 2009, Volume II
- A8 - Magnetic Sensors III
- T. Albach, A. Sutor, R. Lerch - Friedrich-Alexander Universität Erlangen-Nürnberg, Erlangen, Germany
- 83 - 87
The use of materials which convert electrical into mechanical energy is a promising way to design new microsystems. Piezoelectric, magnetostrictive and shape memory materials are used here. Comparing the different conversion principles, magnetostrictive materials show high energy density, short reaction times and non-contact operation. Research on these topics have been made at the Department of Sensor Technology at the University Erlangen-Nuremberg. We fabricate long, narrow bending cantilevers on silicon substrate. Those cantilevers consist of passive and one active, magnetostrictive layer. If a magnetic field is applied along the cantilevers, they bend downwards. As a magnetostrictive material we use Fe49Co49V2 (Vanadium Permendur). The fabrication of the microcantilevers has yet been subject to.
Here, we want to discuss the measuring technology we developed in order to measure the different properties of the microactuators. These are for example the direction of the magnetic Easy Axis and the saturation magnetostriction.