P2.3 - NDIR Gas Measurement in Harsh Environments by Advanced IR Components
- 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016
2016-05-10 - 2016-05-11
- P2 Infrarot-Messverfahren
- S. Biermann, A. Magi, F. Liebold, P. Sachse - Micro-Hybrid Electronic GmbH, Hermsdorf (Germany)
- 555 - 562
Based on the well-known optical NDIR gas measurement principle Micro-Hybrid developed an advanced gas sensor which works in harsh environments like extraordinary moistures and high temperatures up to 200 °C. A field of application is controlling the CO2 atmosphere and the measurement of the humidity in sterilisable incubators. Core components of the developed gas sensor are highly effective and high temperature stable infrared emitter and detector MEMS chips. The precondition for long term stability is a real hermetic housing especially under these rough conditions. Common gluing technologies are not suitable for such terms. To achieve these requirements Microhybrid developed sophisticated packaging technologies for the IR-MEMS chips and the housing components which are appropriate for harsh environments stable hermetic sealing like high temperatures, high humilities or solvent atmospheres.