ÜV1 - Novel Silicon and Polymer Sensors in Acoustics
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- SENSOR+TEST Conferences 2009
- Chapter
- Proceedings SENSOR 2009, Volume I
- Author(s)
- G. Sessler, J. Hillenbrand - Technische Universität Darmstadt, Darmstadt, Germany
- Pages
- 9 - 14
- DOI
- 10.5162/sensor09/v1/u1
- ISBN
- 978-3-9810993-4-8
- Price
- free
Abstract
Acoustic sensing has witnessed two important innovations in recent years. Firstly, silicon microphones fabricated with the methods of micromachining based on capacitive and optical sensing principles have been developed and are already in commercial use. These transducers show advantages compared to conventional microphones, such as miniaturized size, heat resistance, and insensitivity against vibration. Secondly, piezoelectret sensors, based on a new class of cellular polymers with very high piezoelectric coefficients, are presently being designed and investigated. Microphones, pickups, and vibration sensors of this kind show small harmonic distortion, large sensitivity and low noise level and are of very simple design.