2.3 - IR Imaging of Mircosystems: Special Requirements, Experiments and Applications

SENSOR+TEST Conferences 2011
2011-06-07 - 2011-06-09
Proceedings IRS² 2011
I2 - IR Arrays & lmaging
K. Möllmann, M. Vollmer - Brandenburg University of Applied Sciences (Germany)
45 - 50


For a lot of microsystems a uniform temperature or a spatial temperature distribution as well as thermal response time are among the most important parameters. Any contact probe for temperature measurement would induce appreciable thermal losses due to thermal conduction which either complicates the analysis or even makes it impossible. Therefore a contactless measurement is needed to analyze these parameters for microsystem components (e.g. reactors, sensors, actuators). Obviously IR imaging can play an important role for the thermal characterization of different microsystems, to support the research and development work, and to control the system operation without modifying the system performance. In the past investigation of systems characterized by small dimensions in the μm-range and short time constants in the ms-range could only be studied by imaging devices operating in the visible spectral range. Today high-end thermal imaging cameras as the FLIR SC 6000 with frame
rates up to some 36 kHz, temperature resolutions better than 20 mK and spatial resolutions better than 10 μm using high quality infrared optics are available. Such cameras offer the possibility to extend the investigations of microsystems to thermal imaging.
IR imaging of microsystems poses a number of problems which are usually not encountered when studying macroscopic objects. The presentation will first outline specific requirements concerning suppression of mechanical instabilities and vibrations, the need for close-up lenses or microscope objectives and the possibility of high speed recording.
The presentation will demonstrate the improved characterization of fast energy transfer processes producing or consuming thermal energy in such miniaturized systems.