2025 SMSI Bannerklein

OT1.173 - High-Fidelity Modeling of Harmonic Distortions in Piezoelectric MEMS Microphones with a Corrugated Membrane

Event
EUROSENSORS XXXVI
2024-09-01 - 2024-09-04
Debrecen (Hungary)
Band
Lectures
Chapter
OT1 - Theory, Modelling, Design and Testing
Author(s)
F. Schiller, C. Bretthauer, A. Bogner, G. Bosetti, M. Krenzer, K. Gierl, C. Haupt, H. Heiss - Infineon Technologies AG, Neubiberg (Germany)
Pages
33 - 34
DOI
10.5162/EUROSENSORSXXXVI/OT1.173
ISBN
978-3-910600-03-4
Price
free

Abstract

We present a high-fidelity, computationally efficient approach for modeling harmonic distortions in pie-zoelectric MEMS microphones featuring a fully-clamped corrugated membrane design. The described method correctly predicts the total harmonic distortion (THD) of two manufactured design variants, thereby paving the way for THD optimization throughout the design process. Remarkably, one of the design variants shows a THD of 1% at a very high sound pressure level (SPL) of 130 dBSPL, thus out-performing commercially available piezoelectric and capacitive single-backplate (SBP) microphones.

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