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A1.4 - Stoneley Waves Propagation Through rot. YX-LiNbO3/SU-8/Si Structures

Event
54th Winter School on Wave and Quantum Acoustics
2026-02-09 - 2026-02-12
Szczyrk (Poland)
Chapter
Acoustoelectronic Sensors
Author(s)
M. Benetti, C. Caliendo, D. Cannatà - CNR, Rome (Italy)
Pages
12 - 13
DOI
10.5162/WSWQA2026/4
ISBN
978-3-910600-09-6
Price
free

Abstract

Interface acoustic waves (IAWs), also known as Stoneley waves, are theoretically and experimentally investigated in a multilayer platform consisting of Y-rotated, X-propagating LiNbO3​, an SU-8 guiding layer, and a silicon substrate. Two distinct IAW modes with different phase velocities are identified. Numerical simulations and experimental measurements confirm the efficient electroacoustic excitation of the Stoneley modes.

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