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7.2 - 1D phased array for imaging applications in air utilizing MEMS

Event
iCCC2026 - iCampus Cottbus Conference
2026-05-05 - 2026-05-07
Cottbus
Band
Vorträge
Chapter
Ultraschallsensorik und Mobilität
Author(s)
M. Jongmanns, J. M. Monsalve - Fraunhofer IPMS, Dresden
Pages
111 - 114
DOI
10.5162/iCCC2026/7.2
ISBN
978-3-910600-10-2
Price
free

Abstract

We designed a 1D ultrasonic array for phased array applications based on the lateral micromachined ultrasonic transducers (L-CMUT), which are in-house designed and manufactured at the Fraunhofer IPMS. The 1D array is a pretest for a 2D configuration, which would allow beam steering in 2 dimensions. The functionality of the 1D array and its control electronics have been tested and verified. Steering of the beam is possible in 0.33° steps in a range of ±30° before the amplitude decreases up to a maximum angle of ±60°. To characterize the sound field, a setup utilizing an industrial cobot equipped with a reference microphone has been realized. To test the imaging capabilities different objects have been placed up to 1 m in front of the phased array. The measurement system can be used to detect the distance and position of an object relative to the position of the phased array.

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