M3-2.4 - Analysis of the Intrinsic Noise Spectrum of MEMS Microphones

Event

23. ITG/GMA-Fachtagung Sensoren und Messsysteme 2026
2026-06-09 - 2026-06-10
Nürnberg

Band

Vorträge

Chapter

Modellbildung und Signalverarbeitung 2

Author(s)

E. Wallesch, G. Rodriguez Gutierrez, S. Palzer - Technische Universität Dortmund, Dortmund

Pages

469 - 470

DOI

10.5162/sensoren2026/M3-2.4

ISBN

978-3-910600-11-9

Price

free

Abstract

MEMS microphones are silicon-based devices widely used in consumer electronics due to their small size, low power consumption, and low cost. Their intrinsic noise spectrum depends on environmental parameters such as pressure, temperature, and gas composition. In this study, the noise spectrum of ), a MEMS microphone was measured from 5–95 kHz in mixtures of nitrogen (N and methane (CH concentrations can be distinguished, indicating the potential for low-cost environmental sensing using noise analysis. ). Principal component analysis (PCA) shows that CO ), carbon dioxide (CO and CH ₂ ₂ ₄ ₂ ₄