5.3.4 - A Two-Stage Encapsulation Procedure for Sterilization-Resistant MEMS Devices With Integrated SMA Actuator

Event
EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich
Band
Lectures
Chapter
Sensor Arrays and Networks, Integrated Systems
Author(s)
D. Hoffmann, D. Schuhmacher, N. Burghardt, A. Dehé - Hahn-Schickard,Villingen-Schwenningen (Germany), A. Erben - Fraunhofer IWU,Dresden (Germany)
Pages
182 - 183
DOI
10.5162/eurosensors2026/5.3.4
ISBN
978-3-910600-12-6
Price
free

Abstract

Air exchange in buildings affects energy consumption, indoor air quality, and occupant health, and varies dynamically. Continuous monitoring of the air exchange rate (AER) is therefore important to understand real ventilation conditions and detect changes in building performance. Conventional methods only allow for short snapshots and cannot capture this variability during normal operation. Here continuous monitoring combined with automated mass-balance analysis is shown to yield scalable comparison of air exchange rates across rooms and building sections for real-time analysis of ventilation behavior.