8.3.4 - Ultrathin Wearable Thermochromic Tattoo-Based Skin Sensor

Event
EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich
Band
Lectures
Chapter
Flexible and Wearable Sensors
Author(s)
K. Unger, R. Heer, P. Piller - Silicon Austria Labs GmbH,Graz (Austria)
Pages
273 - 274
DOI
10.5162/eurosensors2026/8.3.4
ISBN
978-3-910600-12-6
Price
free

Abstract

Thermal Scanning Probe Lithography (t-SPL) with the NanoFrazor by Heidelberg Instruments allows high-resolution, damage-free nanoscale patterning using localized thermal stimulation from an ultrasharp tip. The Decapede, its first multi-tip version, scales up t-SPL while maintaining resolution through parallel tip operation, enabling the creation of multiple designs simultaneously. This talk will highlight Decapede applications in nanophotonics, including the creation of a photonic sieve and a metalens, demonstrating parallel patterning of complex structures in silicon.