IS 1.3 - Scaling up and Automating Nanodevice Fabrication with Parallelized Multi-tip Thermal Scanning Probe Lithography
- Event
- EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich - Band
- Lectures
- Chapter
- Industry Session 1
- Author(s)
- J. Chaaban, J. Stark, E. Clerc, A. Ubezio, A. Damyanova, F. Könemann, K. Buddha, S. Bonanni - Heidelberg Instruments Nano AG,Zürich (Switzerland)
- Pages
- 313 - 314
- DOI
- 10.5162/eurosensors2026/IS1.3
- ISBN
- 978-3-910600-12-6
- Price
- free
Abstract
Thermal Scanning Probe Lithography (t-SPL) with the NanoFrazor by Heidelberg Instruments allows high-resolution, damage-free nanoscale patterning using localized thermal stimulation from an ultrasharp tip. The Decapede, its first multi-tip version, scales up t-SPL while maintaining resolution through parallel tip operation, enabling the creation of multiple designs simultaneously. This talk will highlight Decapede applications in nanophotonics, including the creation of a photonic sieve and a metalens, demonstrating parallel patterning of complex structures in silicon.