IS 1.3 - Scaling up and Automating Nanodevice Fabrication with Parallelized Multi-tip Thermal Scanning Probe Lithography

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Lectures

Chapter

Industry Session 1

Author(s)

J. Chaaban, J. Stark, E. Clerc, A. Ubezio, A. Damyanova, F. Könemann, K. Buddha, S. Bonanni - Heidelberg Instruments Nano AG,Zürich (Switzerland)

Pages

313 - 314

DOI

10.5162/eurosensors2026/IS1.3

ISBN

978-3-910600-12-6

Price

free

Abstract

Recent advances in optical sensing require compact, high-performance, and application-specific photonic architectures. We demonstrate how two-photon polymerization enables fabrication of high-resolution micro-optical components directly on substrates, fibers, and photonic interfaces for sensing applications. Additive microfabrication enables rapid prototyping of freeform optical elements while reducing assembly complexity. The presented approach highlights the potential of 3D printed micro-optics for next-generation optical sensors and integrated photonic systems.