Mo-ACT-01 - Temperature Dependence of Parametric Snap-Through in Bistable Piezoelectric ScAlN MEMS Plates

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Poster

Chapter

Actuators

Author(s)

P. Egger, M. Mortada, U. Schmid, M. Schneider - Technische Universität Wien,Wien (Austria)

Pages

330 - 331

DOI

10.5162/eurosensors2026/Mo-ACT-01

ISBN

978-3-910600-12-6

Price

free

Abstract

For the first time the temperature dependence between 30 °C and 80 °C of snap-through behaviour of bistable piezoelectric MEMS plates is shown. By exploiting mismatch in thermal expansion coefficients between ScAlN and Si the residual in-plane stress, and thus the buckling height, is tuned. An optimized measurement procedure allows for recording over 40 responses per second, enabling a high resolution parametric study. Understanding how dynamic characteristics of bistable plates are modified with ambient temperature change is a crucial step for future development towards commercial applications.