Mo-ACT-03 - Asymmetric Snap-through Dynamics in Bistable Piezoelectric MEMS Plates

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Poster

Chapter

Actuators

Author(s)

M. Mortada, A. Kraus, J. Gruber, U. Schmid, M. Schneider - TU Wien,Vienna (Austria)

Pages

334 - 335

DOI

10.5162/eurosensors2026/Mo-ACT-03

ISBN

978-3-910600-12-6

Price

free

Abstract

This study experimentally compares the switching behavior of a bistable piezoelectric MEMS plate actuated by an aluminium nitride (AlN) thin film from both ground states using pulse trains with varying voltages and frequencies to investigate nonlinear dynamics. The results show an asymmetry in the double-well potential with a preference for the upper state and demonstrate that adding an additional thin AlN layer to a buckled device modifies the potential energy, enabling tuning of voltage thresholds and snap-through responses, which is valuable for future PMUT applications.