Mo-PHS-02 - Surface-Micromachined 3-Omega Gas Sensor

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Poster

Chapter

Physical Sensors

Author(s)

P. Raimann, G. L. Tchoffo, F. Hedrich, S. Billat - Hahn-Schickard,Villingen-Schwenningen (Germany), A. Dehé - Albert-Ludwigs-University Freiburg,Freiburg (Germany)

Pages

545 - 546

DOI

10.5162/eurosensors2026/Mo-PHS-02

ISBN

978-3-910600-12-6

Price

free

Abstract

In this paper a miniaturized thermal gas sensor with a n-doped polysilicon heating element on a thin silicon nitride membrane is presented. The sensor’s thermal response is dominated by the gas properties, leading to a signal minimum in the out-of-phase component at a frequency proportional to the gas concentration. Operation at excitation frequencies between 3 and 9 kHz minimizes intrinsic 1/f noise sources and allows frequency-based control strategies with linear sensitivity.