Mo-PHS-10 - Piezoelectrically Induced Resonance Frequency Tuning of Buckled-Diaphragm MEMS Ultrasonic Sensors for Multi-Frequency Measurement

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Poster

Chapter

Physical Sensors

Author(s)

K. Yamashita, J. Yamamoto - Kyoto Institute of Technology,Kyoto (Japan)

Pages

562 - 563

DOI

10.5162/eurosensors2026/Mo-PHS-10

ISBN

978-3-910600-12-6

Price

free

Abstract

The resonance frequency of a piezoelectric MEMS ultrasonic sensor with a buckled diaphragm was controlled by piezoelectrically induced stress for multi-frequency measurement. The sensitivity-enhancing buckled shape in the sensing region was maintained over the tuning-voltage range of 0 V to 10 V, despite changes in the overall buckling profile. Tuning voltages of 2 V and 9 V provided resonance frequencies of 90.6 kHz and 43.3 kHz, respectively, with vibration modes yielding adequate piezoelectric output. These results identified practical operating conditions for resonance control in this scheme.