Tu-EFS-04 - Design and Theoretical-Experimental Investigation of a Surface Acoustic Wave Sensor Based on Dual Substrates

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Poster

Chapter

Sensor Applications: Environment, Food And Space

Author(s)

H. Taleb, M. Vanotti, V. Blondeau-Patissier - FEMTO-ST Institute,Besançon (France)

Pages

642 - 643

DOI

10.5162/eurosensors2026/Tu-EFS-04

ISBN

978-3-910600-12-6

Price

free

Abstract

To monitor air pollution, an innovative cascade impactor integrating Surface Acoustic Wave (SAW) sensors has been developed within our team. Conventional impaction plates are replaced by SAW sensors to measure PM₁₀ and PM₂.5, i.e., particles with aerodynamic diameters below 10 µm and 2.5 µm [1]. These sensors are typically based on bulk piezoelectric materials such as AT-cut quartz, which offers excellent thermal stability but low electromechanical coupling, limiting performance. The study investigates alternative substrates, comparing bulk lithium tantalate with a piezoelectric-on-insulator (POI) configuration in terms of performance. Numerical simulations and experiments demonstrate that the POI substrate provides enhanced sensitivity and improved thermal stability. These results highlight its potential for more efficient particulate matter detection.