4.3.2 - Measurement of digital MEMS microphones
- Event
- 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016
2016-05-10 - 2016-05-11
Nürnberg, Germany - Chapter
- 4.3 Akustische Sensoren
- Author(s)
- M. Loibl, S. Walser, J. Klugbauer, G. Feiertag - University of Applied Sciences Munich, Munich (Germany), C. Siegel - EPCOS AG A TDK Group Company, Munich (Germany)
- Pages
- 281 - 287
- DOI
- 10.5162/sensoren2016/4.3.2
- ISBN
- 978-3-9816876-0-6
- Price
- free
Abstract
This paper presents two methods to measure the electro-acoustic parameters of digital MEMS microphones with a pulse density modulated (PDM) output signal. The first method is based on a spectrum analysis of the PDM signal. Here a large number of data points must be recorded to achieve a good frequency resolution. With the large number of data points calculating the characteristic values takes a long time. The second method is based on an analog transformation and a subsequent decimation. With this method the same measurement quality can be reached in a fraction of the calculation time.