2.1.5 Gas Sensor MEMS Platform for Harsh Conditions
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- 2.1 High Temperature Gas Sensors II
- A. Vasiliev, A. Lagutin, A. Pisliakov, N. Zaretskiy, N. Samotaev, A. Sokolov, S. Soloviev - NRC “Kurchatov Institute” (Russia);, A. Lipilin - Institute of Electrophysics of Ural Branch of RAS (Russia), A. Mozalev - (Belarus) State University of radioelectronics and informatics (Belarus)
- 164 - 167
We present a novel approach to the fabrication of MEMS devices, which can be used for gas sensors operating in harsh environment in wireless and autonomous information systems. MEMS platforms based on ZrO2/Y2O3 (YSZ) and alumina membranes are applied in these devices. The methods of fabrication of these ceramic MEMS devices are considered. It is shown that the application of such membranes permits a decrease in MEMS power consumption at 4500 °C down to ~75 mW at continuous heating and down to ~ 1 mW at pulse heating of gas sensor. The application of the platforms is not restricted by gas sensors: they can be used for fast thermometers, bolometric matrices, flowmeteres and other MEMS devices working under harsh environmental conditions.