5.5.6 Stacked Type Potentiometric Solid-State CO2 Gas Sensor for Miniaturization
- 14th International Meeting on Chemical Sensors - IMCS 2012
2012-05-20 - 2012-05-23
- 5.5 Cation Conductor-based Gas Sensors
- N. Choi, H. Lee, S. Moon, W. Yang, J. Kim - Convergence Components & Materials Research Laboratory, Electronics and Telecommunications Research Institute (South Korea)
- 507 - 510
A stacked type photentiometric solid-state (S-PSS) carbon dioxide (CO2) sensor based on Li ion was designed and fabricated on alumina substrate by mass production techniques. This design can reduce the 70 % of active area because no reference material is required. All materials were screen-printed except for electrolyte which was deposited thermal evaporation. The prepared materials were characterized by X-ray diffraction analysis and scanning electron microscopy. Gas response characteristics of S-PSS and planar type PSS (P-PSS) were examined at the range of 350~500 oC and between 16~5000 ppm CO2gas concentrations. The S-PSS sensor was showed from 40 to 90 mV/decchange at operating temperatures. Repetition measurement was very good within 5 mV in full measurement range.