P3.4 - Fabrication of Silicon Oxycarbide-Based Microcomponents via Photolithographic and Soft Lithography Approaches

Event
AMA Conferences 2013
2013-05-14 - 2013-05-16
Nürnberg
Band
Proceedings SENSOR 2013
Chapter
P3 - Technology
Author(s)
E. Ionescu, S. Martinez Crespiera, M. Schlosser, R. Riedel, K. Flittner, H. Schlaak - Technische Universität Darmstadt (Germany)
Pages
746 - 749
DOI
10.5162/sensor2013/P3.4
ISBN
978-3-9813484-3-9
Price
free

Abstract

This study presents the preparation of ceramic micro components starting from a commercially available polysiloxane. The ceramic micro components were prepared via photolithographic and soft litho¬graphy approaches. The ceramic samples prepared upon photolithography exhibit aspect ratios of 3:1 as well as dimensions down to 20 μm. Furthermore, soft lithographic techniques have been used to prepare dense, crack free and complex-shaped SiOC-based micro components (e.g., a valve seat for a miniaturized burner).

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