5.4 - Integrated pre-concentrator gas sensor micro system for trace gas detection
- 12. Dresdner Sensor-Symposium 2015
2015-12-07 - 2015-12-09
Hotel Elbflorenz, Dresden
- 5. Mikro- und Nanosensorik
- M. Leidinger, T. Sauerwald, A. Schütze - Universität des Saarlandes, Saarbrücken/D, M. Rieger - Fraunhofer ICT, Pfinztal/D, C. Alépée - SGX Sensortech SA, Corcelles/CH
- 72 - 77
An integrated microsystem for trace gas detection is presented. Using metal-organic frameworks for gas pre-concentration and metal oxide semiconductor gas sensors for gas measurement, ppb concentrations of benzene have successfully been detected. Two metal organic framework materials have been characterized regarding their performance for gas adsorption and desorption. A state-ofthe- art commercial adsorbent material was also characterized via inverse gas chromatography (iGC) for reference, however it was outperformed by the metal-organic frameworks. The materials were deposited on micro hot plates and integrated into sensor packages together with dual metal oxide semiconductor gas sensors. These integrated systems have been characterized in FEM simulations as well as test measurements. Both the simulations and the measurements prove the suitability of the design of the system. Significant increase of ppb level target gas concentrations inside the systems could be observed with the gas sensors during thermal desorption of the preconcentrator.