B8.1 - Sensors for geometric accurate measurements in manufacturing
- Event
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg - Band
- Proceedings SENSOR 2009, Volume II
- Chapter
- B8 - Accurate Geometric Measurements
- Author(s)
- A. Weckenmann, O. Tan, J. Hoffmann, A. Schuler - Friedrich-Alexander Universität Erlangen-Nürnberg, Erlangen, Germany, S. Buettgenbach - Technische Universität Braunschweig, Braunschweig, Deutschland
- Pages
- 133 - 138
- DOI
- 10.5162/sensor09/v2/b8.1
- ISBN
- 978-3-9810993-5-5
- Price
- free
Abstract
Main idea for every dimensional measurement is the detection of the surfaces or a group of points on an object by means of a probing system. The application of this fundamental idea in the field of micro and nano metrology, with size aspects or part tolerances in the sub micrometer regions, is very challenging. This task requires the application of precise length measuring systems for setting up a coordinate system and suitable sensors. The aim of this paper is to demonstrate recent scientific and technological developments by means of the most promising existing applications in this field.