B8.4 - Optical 3D Measurement of Micro Structures
- SENSOR+TEST Conferences 2009
2009-05-26 - 2009-05-28
Congress Center Nürnberg
- Proceedings SENSOR 2009, Volume II
- B8 - Accurate Geometric Measurements
- A. Ettemeyer, M. Marxer, C. Keferstein - NTB Interstaatliche Hochschule für Technik Buchs, Buchs, Switzerland
- 151 - 156
Proving the performance of high precision micro components requires special knowledge and techniques in their design and manufacture. With dimensions ranging from less than 0.1 mm to several mm, such components are often delicate and fragile and require non contact measurement techniques. This calls for the use of optical inspection techniques. Optics offers many advantages such as very fast, non contact inspection, no influence on the measured object, 3D measurement capability, full field inspection and many more.
Especially during the last few decades there has been a growing interest in optical inspection applications. Modern optical techniques are driven by computer techniques, software and video techniques and show an enormous degree of innovation every year. In this paper, we present and compare two optical techniques for 3D measurement, both of which offer full field 3D information and are specially suited for micro structures: white light interferometry and digital holography.