3.1.2 - Development of a 3D capable probing system based on electrical near-field interactions for micro- and nanocoordinate metrology
- 18. GMA/ITG-Fachtagung Sensoren und Messsysteme 2016
2016-05-10 - 2016-05-11
- 3.1 Mikro- und Nanomesssysteme
- Z. Sun, T. Hausotte - Friedrich-Alexander-Universität Erlangen-Nürnberg, Erlangen (Germany)
- 156 - 161
With decreasing structure dimensions and rising aspect ratios of the products the demands for microand nano-metrology to measure the components of microsystems and components with microstructure have increased. Therefore nanometre resolving 3D capable probing sensors and corresponding 3D positioning systems are required. At the Friedrich-Alexander-Universität Erlangen-Nürnberg a mechanical contact-free, sub-nanometre-resolving 3D micro probing system based on electrical near-field interactions has been developed and investigated. This system is as a probing system integrated in the nanopositioning and nanomeasuring machine NMM-1. To improve the measuring dynamics and expand the application possibilities the probing system has been extended with a 3D movable piezoelectric nanoscanner to directly detect its probing direction from the measurement signals.