A6.2 - Measurement and control of humidity traces in gases with solid electrolyte cells
- AMA Conferences 2017
2017-05-30 - 2017-06-01
- Proceedings Sensor 2017
- A6 - Gas Sensors III
- J. Zosel, M. Schelter, U. Guth, M. Mertig - Kurt-Schwabe-Institut für Mess- und Sensortechnik e.V. Meinsberg, Waldheim (Germany)
- 112 - 115
The measurement of humidity traces in ultra-pure gases is an important task for the monitoring of many industrial processes such as the production of electronic circuits or aprotic battery systems. All sensors and controllers used for that application have to be calibrated or reassessed regularly at the best in their measuring environment. For that purpose, small mobile generators for supplying gas flows with defined ultra-low humidity concentrations are required, which have a short warm-up time and are easy-to-use. In this contribution, the development of a gas generator for the preparation of gases with defined water vapour content in the ppm range and based on a solid electrolyte cell made of yttria-stabilized zirconia (YSZ) is discussed. It is shown that this principle is suited to provide such calibration gases at flow rates down to frost point temperatures below -70 °C.