C2.3 - Novel measurement techniques with annular arrays for scanning acoustic microscopy
- Event
- AMA Conferences 2017
2017-05-30 - 2017-06-01
Nürnberg, Germany - Band
- Proceedings Sensor 2017
- Chapter
- C2 - Acoustic Methods II
- Author(s)
- S. Kümmritz, A. Juhrig, L. Timmermann, E. Kühnicke - Technische Universität Dresden (Germany)
- Pages
- 329 - 333
- DOI
- 10.5162/sensor2017/C2.3
- ISBN
- 978-3-9816876-4-4
- Price
- free
Abstract
Scanning acoustic microscopy (SAM) is an important tool in semiconductor industry for quality assurance. It is also used for non-destructive material characterization. Common acoustic microscopes only work with focused single element probes. The usage of phased array techniques in SAM can improve efficiency and enable new applications.
Annular Arrays allow the use of advanced measurement techniques like the simultaneous determination of thickness and sound velocity or the identification of curved interfaces. Furthermore, annular arrays enable the variation of the focus position, which allows the simultaneous examination of different depths. In this contribution we present our research in progress of the development of new multichannel microscopes and, in accordance with that, 40 MHz annular probes based on 1-3 composites.