P2.5 - Reliability and long-term stability of the mounted silicon for precision measurements
- AMA Conferences 2017
2017-05-30 - 2017-06-01
- Proceedings Sensor 2017
- P2 - Mechanical Sensors
- T. Frank, A. Cyriax, A. Grün, M. Kermann, T. Ortlepp - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
- 589 - 592
Silicon strain gauges have a much higher gauge factor than metal foil strips. These can replace piezoresistive thin-film resistors and thus create a cost-effective and high-quality sensor. The technical challenge lies in the long-term stable connection between the silicon strain gauge and the steel spring body. Preferably, sealing glass paste is used. Due to the high processing temperature of approx. 450 ° C and the different coefficients of thermal expansion, high mechanical stresses are induced. To ensure that this stress does not lead to failure, very precise process control is necessary. Investigations were carried out on different material savings, long-term thermal interferences and Air to Air Thermal Shock Testing.