GS2.1 - Ultra Low Power Thin Film MEMS Gas Sensor for Battery operated Gas Alarm
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
- Gas Sensors 2
- H. Ohnishi - Osaka Gas Co., Ltd., Osaka (Japan)
- 95 - 96
Osaka Gas and Fuji Electric have developed a MEMS gas sensor obtained by laminating “nanocolumnar structure SnO2 thin film" and "selective oxidation catalyst layer" on the circular diaphragm support layer with a built-in thin film heater. Ultra-low power (0.06mW) required for 5 year battery operation was achieved by separating the functional elements of gas sensors, optimizing the materials and structures in charge of each function, microminiaturizing, and driving with low power ultra-short pulse. Furthermore, this sensor has realized higher sensitivity and higher selectivity than conventional methane sensors. In May 2015, Osaka Gas released the world's first battery operated city gas alarm equipped with this sensor. This work has achieved the innovation of gas sensor to thin film type / MEMS type device, and opened up a new era of gas sensor technology.