GS7.1 - Integrated Microheaters and the Role of Localized Temperature Control in Chemical and Biochemical Sensing
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
- Gas Sensors 7 - Systems
- S. Semancik - National Institute of Standards and Technology (NIST), Biomolecular Measurement Division, Gaithersburg, Maryland (USA)
- 272 - 273
Temperature governs the nature of materials properties and varied interactional processes that can play a role in generating signals for chemical and biochemical sensing. Integrating heaters into microscale devices with other components required for sensing enables the control and measurement of temperature at the active portion of such devices. Fabrication methods and characteristics are described for two types of temperature-addressable platforms: microhotplate arrays of chemiresistive elements for gas-phase chemical sensing, and planar, 3-electrode electrochemical structures for stability measurements on solution-phase biochemicals. The manner by which rapid localized heating can enhance data streams for sensor-based chemical recognition, and also allow faster measurements of biomolecular stability of small-volume samples, is discussed.