HI.2 - Integrated MEMS Hydrogen Gas Sensor with PdCuSi-based Hydrogen Actuators and Micro Thermal Conductivity Detector
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
- Hybrid/Integrated Sensors
- H. Yamazaki, Y. Hayashi, D. Ono, T. Saito, A. Kojima - Corporate Research and Development Center, Toshiba Corporation, Kawasaki (Japan), K. Masunishi - Corporate Manufacturing Engineering Center, Toshiba Corporation, Yokohama (Japan)
- 374 - 375
We report a dual-range MEMS hydrogen sensor that has a micro thermal conductivity detector (μ-TCD) and a capacitive sensor with PdCuSi-based hydrogen actuators. A surface micromachining process with double TiN layers is proposed for integration of the capacitive sensor and the μ-TCD on the same chip. We confirmed that both of the fabricated sensors exhibited a fast response with nohysteresis. The capacitive sensor had high sensitivity for low hydrogen concentrations ranging from 0.05 vol % (500 ppm) to 5 vol % despite being heater-less, while the μ-TCD had excellent linearity for high concentrations near 100 vol %. Furthermore, the capacitive sensor showed excellent selectivity for hydrogen thanks to the material properties of PdCuSi. Therefore, the proposed sensor is suitable for hydrogen leakage detection with low power consumption and for precise measurement of highconcentration hydrogen gas.