P2AR.7 - Multi-Sensor Comprising Capactive, Resistive and Conductive Micro-sensors
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
- P-2 - Sensor Arrays
- S. Moon, J. J. Lee, S. Im, J. Kim, J. Im - ETRI, Daejeon-Si (South Korea)
- 913 - 914
Multi-senosr was fabricated based on micro-heater and capacitive, resistive and conductive operation method with low power consumption and CMOS compatible process. In the structure of micro-heater, the resistances of two semi-circled Pt heaters are connected to the spreader for thermal uniformity. Based on the above design, low power consumption air quality gas sensor was fabricated by using CMOS compatible MEMS process. Bridge type micro-heater based on Si substrate was fabricated by surface micromachining technique. SnO2 based thick film for a gas sensing material was deposited using screen printing technique on the Si substrate in the form of slurry. And polyimide thick film was deposited using ink jetting method. Micro multi-sensor showed temperature, humidity and gas sensing properties simultaneously.