P1SM.8 - Technology of Rapid Prototyping SMD MOX Gas Sensors.
- Event
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria - Chapter
- P-1 - Sensor Systems and Manufacturing
- Author(s)
- N. Samotaev, K. Oblov, A. Ivanova - National Research Nuclear University MEPHI, Moscow (Russia)
- Pages
- 653 - 654
- DOI
- 10.5162/IMCS2018/P1SM.8
- ISBN
- 978-3-9816876-9-9
- Price
- free
Abstract
The perspective laser micromilling technology for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) sensor is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors. The main technical factors affecting the use of sensors in various applications are presented.