D2.3 - Metal Oxide Gas Sensors with Three-Parameter Readout
- SENSOR+TEST Conferences 2011
2011-06-07 - 2011-06-09
- Proceedings SENSOR 2011
- D2 - High Temperature Sensors II
- A. Hackner, G. Müller - ADS Innovation Works, München (Germany)
- 549 - 550
We report on MOX gas sensors which had been specifically configured to enable simultaneous readout of three different sensor signals from a single MOX layer. These single-sensor devices are to function as a complete sensor array and thus are able to provide enhanced selectivity without necessitating multiple sensor devices.
The sensor signals that can be extracted from such sensors are:
ΔT: Temperature response: the thermometer function is used for sensing temperature changes due to catalytic gas interactions with the sensing layer;
ΔR: Resistivity response : allows gas-induced resistance changes of the MOX layer to be monitored;
ΔI: Surface ionization response: allows ion currents to be detected which derive from the thermal ionization of analylte molecules adsorbed on the MOX sensing layer.
Each single measurement principle is sensitive to the surface temperature and to the sensing material actually employed. The sensor therfore provides a huge degree of flexibility for adaption to specific measurement applications.