SP1.4 - Laser Etching Effects on the Electrical and Mechanical Properties of Barium Titanate Thick Films
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- Special Session: INTAKE 1
- Author(s)
- Y. Matsui, K. Maruyama, Z. Wang, H. Kurita, F. Narita - Tohoku University, Sendai (Japan), Y. Kawakami - Research Institute for Electromagnetic Materials, Tomiya (Japan)
- Pages
- 28 - 29
- DOI
- 10.5162/EUROSENSORS2025/SP1.4
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
The rapid spread of the Internet of Things (IoT) has increased demand for compact, high-capacity ca-pacitors. In this study, barium titanate (BaTiO₃, BTO) thick films were fabricated by aerosol deposition (AD) and etched by laser. Electrical and mechanical evaluations revealed that laser etching enhanced the relative permittivity and Young’s modulus of the films. These findings indicate that laser etching has strong potential as a processing technique for BTO thick films used in compact capacitors.