| EUROSENSORS XXXVII |
M2.2.1 - A novel piezoelectric MEMS speaker with push-pull actuation for in-ear applications |
F. Cerini, S. Adorno - STMicroelectronics, Cornaredo (Italy), C. Gazzola, F. P. Perli, M. Rosso, A. Corigliano - Politecnico di Milano, Milano (Italy) |
| EUROSENSORS XXXVII |
M2.2.2 - Advancing On-Chip Micromotor Fabrication Through Electrochemical Micromachining of Silicon |
F. Abazar, S. Surdo, C. Cozzi, G. Polito, G. Barillaro - University of Pisa, Pisa (Italy) |
| EUROSENSORS XXXVII |
M2.2.3 - High-resolution laser ablation of a copper layer for the fabrication of 3D-printed MEMS and microsensors |
M. Roig, D. Bourrier, P. -F. Calmon, C. Arvanitis, C. Bergaud, V. Mansard - LAAS-CNRS, Toulouse (France) |
| EUROSENSORS XXXVII |
M2.2.4 - Impact of Nitrogen Doping on the Q-Factor of Polycrystalline 3C-SiC MEMS Resonators |
D. Huber, P. Jurekovic, C. Schallert, G. Pfusterschmied, U. Schmid - TU Wien, Vienna (Austria) |
