M1.1.2 - Simultaneous Thermal and Optical (De-)Activation of Microhotplate-Based CMOS-Integrated SnO2 + Ag NPs Gas Sensors
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- M1.1 - Gas Sensors 1
- Author(s)
- F. Sosada-Ludwikowska, A. Köck, L. Egger - Materials Center Leoben Forschung GmbH, Leoben (Austria), O. Casals - Universitat de Barcelona, Barcelona (Spain), J. D. Prades - Universitat de Barcelona, Barcelona (Spain), Technische Universität Braunschweig, Braunschweig (Germany), C. Fleury, A. Roshanghias - Silicon Austria Labs GmbH, Graz (Austria), A. Tekautz, M. Donnelly - UnravelTEC OG, Graz (Austria)
- Pages
- 40 - 41
- DOI
- 10.5162/EUROSENSORS2025/M1.1.2
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
In this paper, we report on the light activation of SnO₂-based gas sensing films decorated with Ag na-noparticles (NPs). The sensing layers were deposited by spray pyrolysis, and the metallic NPs weresputter-deposited on CMOS-integrated microhotplate-based gas sensor devices. The response towards the target gas CO can be tuned by different LED wavelengths. From the results achieved, we conclude that the combined thermal-optical excitation of the gas sensing materials can make a significant contri-bution to optimizing chemo-resistive MOx-based gas sensor devices.