T6.1.1 - Development of Piezoelectric Micro-Cantilever Gas Sensor
- Event
- EUROSENSORS XXXVII
2025-09-07 - 2025-09-10
Wroclaw - Band
- Lectures
- Chapter
- T6.1 - Gas Sensors 4
- Author(s)
- J. Moore, A. Michael - The University of New South Wales Sydney, Sydney (Australia)
- Pages
- 144 - 145
- DOI
- 10.5162/EUROSENSORS2025/T6.1.1
- ISBN
- 978-3-910600-07-2
- Price
- free
Abstract
This paper presents the development of on-chip dynamic functionalized PZT based piezoelectric canti-lever with self-sensing read-out circuit. The cantilever consists of Pd layer acting as a top electrode and functional layer, with the PZT grown on the bottom Pt/Ti electrode. The cantilever has been fabricated using surface micro-machining and characterized. It demonstrated 0.1 % shift in resonant frequency per 12 MPa stress change in the functional layer and 1.125 µm change in displacement at resonance fre-quency per 1 MPa stress change in the functional layer.